Methods and structures for monolithically integrating monocrystalline
silicon and monocrystalline non-silicon materials and devices are
provided. In one structure, a monolithically integrated semiconductor
device structure comprises a silicon substrate and a first
monocrystalline semiconductor layer disposed over the silicon substrate,
wherein the first monocrystalline semiconductor layer has a lattice
constant different from a lattice constant of relaxed silicon. The
structure further includes an insulating layer disposed over the first
monocrystalline semiconductor layer in a first region and a
monocrystalline silicon layer disposed over the insulating layer in the
first region. The structure includes at least one silicon-based
photodetector comprising an active region including at least a portion of
the monocrystalline silicon layer. The structure also includes a second
monocrystalline semiconductor layer disposed over at least a portion of
the first monocrystalline semiconductor layer in a second region and
absent from the first region, wherein the second monocrystalline
semiconductor layer has a lattice constant different from the lattice
constant of relaxed silicon. The structure includes at least one
non-silicon photodetector comprising an active region including at least
a portion of the second monocrystalline semiconductor layer.