An optical interference display cell is described. A first electrode and a
sacrificial layer are sequentially formed on a transparent substrate and
at least two openings are formed in the first electrode and the
sacrificial layer to define a position of the optical interference
display cell. An insulated heat-resistant inorganic supporter is formed
in each of the openings. A second electrode is formed on the sacrificial
layer and the supporters. Finally, a remote plasma etching process is
used for removing the sacrificial layer.