Tunable, bio-functionalized, nanoelectromechanical systems (Bio-NEMS), micromechanical resonators (MRs), nanomechanical resonators (NRs), surface acoustic wave resonators, and bulk acoustic wave resonators having superhydrophobic surfaces for use in aqueous biochemical solutions. The MRs, NRs or Bio-NEMS include a system resonator that can vibrate or oscillate at a relatively high frequency and to which an analyte molecule(s) contained in the solution can attach or upon which small molecular-scale forces can act; a device for adjusting a relaxation time of the solution, to increase the quality (Q-factor) of the resonator inside the solution, to reduce energy dissipation into the solution; and a device for detecting a frequency shift in the resonator due to the analyte molecule(s) or applied molecular-scale forces. The resonator can include roughness elements that provide superhydrophobicity and, more particularly, gaps between adjacent asperities for repelling the aqueous solution from the surface of the device.