Disclosed are a metal line of a semiconductor device and a method of
manufacturing the same. In one embodiment, the metal line includes a
first interlayer dielectric layer pattern formed on a lower
interconnection structure and having a via hole that exposes a lower
interconnection of the lower interconnection structure, a first barrier
pattern selectively covering a sidewall of the via hole and the lower
interconnection, a second interlayer dielectric layer pattern on the
first interlayer dielectric layer pattern and having a trench that
exposes the via hole, a second barrier pattern covering an inner wall of
the trench and the first barrier pattern, a seed pattern formed on the
second barrier pattern, and a copper line formed on the seed pattern.