An implantable hermetically sealed microelectronic device and method of
manufacture are disclosed. The microelectronic device of the present
invention is hermetically encased in a insulator, such as alumina formed
by ion bean assisted deposition ("IBAD"), with a stack of biocompatible
conductive layers extending from a contact pad on the device to an
aperture in the hermetic layer. In a preferred embodiment, one or more
patterned titanium layers are formed over the device contact pad, and one
or more platinum layers are formed over the titanium layers, such that
the top surface of the upper platinum layer defines an external,
biocompatible electrical contact for the device. Preferably, the bottom
conductive layer is larger than the contact pad on the device, and a
layer in the stack defines a shoulder.