Fuses and methods of forming fuses. The fuse includes: a dielectric layer
on a semiconductor substrate; a cathode stack on the dielectric layer, a
sidewall of the cathode stack extending from a top surface of the cathode
stack to a top surface of the dielectric layer; a continuous polysilicon
layer comprising a cathode region, an anode region, a link region between
the cathode and anode regions and a transition region between the cathode
region and the link region, the transition region proximate to the
sidewall of the cathode stack, the cathode region on a top surface of the
cathode stack, the link region on a top surface of the dielectric layer,
both a first thickness of the cathode region and a second thickness of
the link region greater than a third thickness of the transition region;
and a metal silicide layer on a top surface of the polysilicon layer.