A fluorinated monomer of cyclic acetal structure has formula (1) wherein R
is a C.sub.1-C.sub.20 alkyl group which may be substituted with halogen
or separated by oxygen or carbonyl, and Z is a divalent organic group
which forms a ring with alkylenoxy and contains a polymerizable
unsaturated group. A polymer derived from the fluorinated monomer may be
endowed with appropriate water repellency, water sliding property,
lipophilicity, acid lability and hydrolyzability and is useful in
formulating a protective coating composition and a resist composition.
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