A method for forming self-assembled patterns on a substrate surface is
provided. First, a block copolymer layer, which comprises a block
copolymer having two or more immiscible polymeric block components, is
applied onto a substrate that comprises a substrate surface with a trench
therein. The trench specifically includes at least one narrow region
flanked by two wide regions, and wherein the trench has a width variation
of more than 50%. Annealing is subsequently carried out to effectuate
phase separation between the two or more immiscible polymeric block
components in the block copolymer layer, thereby forming periodic
patterns that are defined by repeating structural units. Specifically,
the periodic patterns at the narrow region of the trench are aligned in a
predetermined direction and are essentially free of defects. Block
copolymer films formed by the above-described method as well as
semiconductor structures comprising such block copolymer films are also
described.