An apparatus/method which may comprise: a very high power line narrowed
lithography laser light source which may comprise: a solid state seed
laser system which may comprise: a pre-seed laser providing a pre-seed
laser output; a fiber amplifier receiving the pre-seed laser output and
providing an amplified seed laser pulse which may comprise: a pulse
having a nominal wavelength outside of the DUV range; a frequency
converter converting to essentially the wavelength of the amplifier gain
medium; a first and a second gas discharge laser amplifier gain medium
operating at different repetition rates from that of the seed laser
output; a beam divider providing the amplifier gain mediums with output
pulses from the seed laser; a beam combiner combining the outputs of each
respective amplifier gain medium to provide a laser output light pulse
beam having the pulse repetition rate of the solid state seed laser
system.