An illumination system for a microlithography projection exposure
installation is used to illuminate an illumination field with the light
from a primary light source (11). The illumination system has a light
distribution device (25) which receives light from the primary light
source and, from this light, produces a two-dimensional intensity
distribution which can be set variably in a pupil-shaping surface (31) of
the illumination system. The light distribution device has at least one
optical modulation device (20) having a two-dimensional array of
individual elements (21) that can be controlled individually in order to
change the angular distribution of the light incident on the optical
modulation device. The device permits the variable setting of extremely
different illuminating modes without replacing optical components.