A non-destructive method to inverse-calculate a fiber probe aperture size,
and a prediction method of the simulation and fabrication profile of near
field photolithography are provided. The error between an experimental
result of the photolithography and a simulation result of the theoretical
model of near field photolithography is set as an objective function to
inverse-calculate a fiber probe aperture size that can match with the
photolithography experiment and the theoretical model of near field
photolithography. Finally, by comparing the fabrication profile of the
photolithography experiment and that of the simulation result of the
inverse-calculated fiber probe aperture size, it is verified that the
inverse-calculated fiber probe aperture size is reasonable and
acceptable. By combining with other parameter control of near field
photolithography, the present invention also proposes a prediction method
of the fabrication profile of near field photolithography by means of
inversely calculating the fiber probe aperture size.