An excimer lamp which can emit UV radiation with a high degree of
efficiency and high degree of uniformity, has a UV-reflecting film that
does not peel. The excimer lamp is fitted with a silica glass discharge
vessel that encloses a discharge gas which forms excimer molecules by
dielectric barrier discharge in an internal space enclosed by a top wall
panel, a bottom wall panel, side wall panels and end panels and with an
electrode on both the outer surface of the top wall panel and another
electrode on the outer surface of the bottom wall panel. On the inner
surface of the discharge vessel, a UV-reflecting film comprised of silica
and alumina particles is formed, at least, on the inner surface area of
the side wall panels with the silica particles composing at least 30
weight % of the UV-reflecting film.