A particle-optical apparatus, such as an ESEM.RTM., for simultaneous
observing a sample with particles and photons. A pressure limiting
aperture (PLA) is placed in a diaphragm between the objective lens of the
ESEM.RTM. and the sample position. The distance between the sample
position and the aperture is sufficiently small to allow a large
collection angle of the photons through this aperture. A mirror is placed
between the diaphragm and the objective lens. Due to the large collection
angle for photons a large NA is achieved. The small distance between
sample position and aperture also result in less scattering of electrons
than occurs in ESEM's where a mirror is placed between aperture and
sample position, as the electrons have to travel through only a limited
length in a high pressure area. Embodiments describe combinations where
e.g. an immersion lens is used.