The invention provides cleaning sheets for use in cleaning, e.g., various
substrate-processing apparatus, systems for conveying exposure masks
(reticles) in microfabrication, etc., and a method of cleaning these with
the cleaning sheets. A cleaning sheet which comprises a sheet material
comprising a thermoset resin layer having porosity and, formed on one
side of the sheet material, a pressure-sensitive adhesive layer
comprising a thermoplastic resin.