A Mixed-Signal Semiconductor Platform Incorporating Castellated-Gate
MOSFET device(s) capable of Fully-Depleted operation is disclosed along
with a method of making the same. The composite device/technology
platform has robust I/O applications and includes a starting
semiconductor substrate of a first conductivity type. One or more
isolated regions of at least a first conductivity type is separated by
trench isolation insulator islands. Within an isolated region designated
for castellated-gate MOSFETs there exists a semiconductor body consisting
of an upper portion with an upper surface, and a lower portion with a
lower surface. Also within the castellated-gate MOSFET region, there
exists a source region, a drain region, and a channel-forming region
disposed between the source and drain regions, and are all formed within
the semiconductor substrate body. The channel-forming region within the
isolated castellated-gate MOSFET region is made up of a plurality of
thin, spaced, vertically-orientated conductive channel elements that span
longitudinally along the device between the source and drain regions. One
or more of the trench isolated regions may contain at least one type or
polarity of logic and/or memory computing device. Alternately or
additionally, one or more type of Logic and/or memory device may be
incorporated within vertically displaced regions above the active body
region of the semiconductor wafer, embedded within Interlevel Dielectric
Layers.