Systems configured to perform a non-contact method for determining a
property of a specimen are provided. One system configured to perform a
non-contact method for determining a property of a specimen includes a
focused biasing device configured to provide a stimulus to a focused spot
on the specimen. The system also includes a sensor configured to measure
a parameter of a measurement spot on the specimen. The measurement spot
overlaps the focused spot. The system further includes a processor
configured to determine the property of the specimen from the parameter.