There is provided a method and a device capable of holding a sheet-like workpiece without wrinkles. The sheet-like workpiece holding method includes mounting the sheet-like workpiece such that almost no tensile force is applied thereon on a machining table, and pressing out wrinkles of the sheet-like workpiece by lowering a pressing member whose surface facing to the workpiece protrudes in the shape of a convex lens toward the workpiece so that the workpiece is pressed against the machining table. The method also includes retaining the sheet-like workpiece on the machining table using suction while continuously pressing the sheet-like workpiece with the pressing member and releasing the pressing force of the pressing member while retaining the sheet-like workpiece.