An (Al, Ga, In)N and ZnO direct wafer bonded light emitting diode (LED),
wherein light passes through electrically conductive ZnO. Flat and clean
surfaces are prepared for both the (Al, Ga, In)N and ZnO wafers. A wafer
bonding process is then performed between the (Al, Ga, In)N and ZnO
wafers, wherein the (Al, Ga, In)N and ZnO wafers are joined together and
then wafer bonded in a nitrogen ambient under uniaxial pressure at a set
temperature for a set duration. After the wafer bonding process, ZnO is
shaped for increasing light extraction from inside of LED.