Methods, systems, program products are disclosed that control placement of
dummy shapes about sensitive circuit elements such that the dummy shapes
are at least substantially similar for each circuit element even though
the dummy shapes are auto-generated. In one embodiment, the invention
includes providing dummy shape pattern pitch information to a designer,
and allowing placement of circuit elements at integer multiples of one or
more of the pitches such that the dummy shapes are at least substantially
similar about each instance of the circuit element. Another embodiment
includes allowing placement of a marker about a circuit element to
indicate an area in which dummy shapes are to be substantially identical,
and then using the marker to place the circuit element. Dummy shapes
generated within the marker ensure substantially identical dummy shapes
for each instance of the circuit element. The invention also includes the
integrated circuits formed.