A shutter device makes it possible to restrict bounding of a shutter blade using a shock-absorbing member when movement of the shutter blade is completed. In addition, the shutter device makes it possible to reduce production of dust that is produced when the shock-absorbing member and the shutter blade collide with each other. Examples of dust are wear powder and flake.

 
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< Camera integrated with deformable supporting structure

> Camera apparatus having shutter control apparatus

> Substrate processing apparatus

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