A method of manufacturing an inkjet head includes laminating a first separation film on a substrate and laminating a second separation film on the first separation film. A lower structure having a pressure chamber storing ink and an ink ejecting nozzle is formed independently of the substrate. An upper structure having an actuator changing the pressure of the pressure chamber to eject ink is formed on the second separation film with a liquid or vapor phase method. Grooves are formed in the upper structure extending from an upper surface of the upper structure to an interface between the first separation film and the second separation film. A separation liquid applied to the interface at a region exposed by the grooves separates the first and second separation films to release the upper structure from the substrate. The upper structure and the lower structure are then joined together.