A nonvolatile memory cell having a contact area between a phase-change
material such as a chalcogenide and a heat source which is smaller than
photolithographic limits is described. To form this cell, a conductive or
semiconductor pillar is exposed at a dielectric surface and recessed by
selective etch. A thin, conformal layer of a spacer material is deposited
on the dielectric top surface, the pillar top surface, and the sidewalls
of the recess, then removed from horizontal surfaces by anistropic etch,
leaving a spacer on the sidewalls defining a reduced volume within the
recess. The phase change material is deposited within the spacer, having
a reduced contact area to the underlying conductive or semiconductor
pillar.