In a method for describing, evaluating and improving optical polarization
properties of a projection objective of a microlithographic projection
exposure apparatus, the Jones or Stokes vectors are firstly determined at
one or more points in the exit pupil of the projection objective. These
are then described at least approximately as a linear superposition of
predetermined vector modes with scalar superposition coefficients. The
optical polarization properties can subsequently be evaluated on the
basis of the superposition coefficients.