Various methods and systems for identifying defect types on a wafer are
provided. One computer-implemented method for identifying defect types on
a wafer includes acquiring output of an inspection system for defects
detected on a wafer. The output is acquired by different combinations of
illumination and collection channels of the inspection system. The method
also includes identifying defect types of the defects based on the output
acquired by a set of the different combinations. The set of the different
combinations is selected based on the defect types to be identified on
the wafer and a wafer type of the wafer such that a different set of the
different combinations of the illumination and collection channels is
used for identifying different defect types on different wafer types.