An object of the present invention is to provide a resistive nonvolatile
memory element having an electric current path which can be realized by a
simple and convenient process, and capable of allowing for
micro-fabrication.The resistive nonvolatile memory element of the present
invention includes first electrode 203, oxide semiconductor layer 204a
which is formed on the first electrode 203 and the resistance of which is
altered depending on the applied voltage, metal nanoparticles 204b having
a diameter of between 2 nm and 10 nm arranged on the oxide semiconductor
layer 204a, tunnel barrier layer 204c formed on the oxide semiconductor
layer 204a and on the metal nanoparticles 204b, and second electrode 206
formed on the tunnel barrier layer 204c, in which the metal nanoparticles
204b are in contact with the oxide semiconductor layer 204a.