In a surface emitting semiconductor laser, the primary surface of a
substrate includes first to third areas. The first and second areas are
contiguous to each other, and the third area surrounds the first and
second areas. A first DBR is provided on the substrate. An active layer
is provided on the following: the first DBR; the first and second areas;
and a boundary therebetween. A first semiconductor spacer layer is
provided on the active layer. A second semiconductor spacer layer is
provided on the first semiconductor spacer layer. The conductivity type
of the first semiconductor spacer layer is different from that of the
second semiconductor spacer layer. A tunnel junction region is on the
first area and between the first and the second semiconductor spacer
layers. The active layer, the first semiconductor spacer layer, the
second semiconductor spacer layer, the tunnel junction region constitutes
an optical cavity mesa, which includes low-resistance and high-resistance
regions located on the first area and the second area, respectively. The
low-resistance region includes the tunnel junction region. A second DBR
is on the second semiconductor spacer layer and the first area. A first
electrode is on the first and second areas and the boundary.