The present invention has an object of controlling power consumption by a
vacuum pump by varying the number of revolutions of the vacuum pump in
accordance with the operating state of a vacuum device.The condition
setting part 4 sets the relationship between the operating state of the
vacuum device 10 and the rotational speed of the vacuum pump 2 that
evacuates the vacuum device 10. This relationship is set to an
appropriate value so as to prevent the rotational speed of the vacuum
pump 2 from becoming a higher rotational speed than is required. The
control part 6, to which external signals S1 through Sn corresponding to
the operating state of the vacuum device 10 are input, reads out from the
condition setting part 4 and outputs the rotational speed of the vacuum
pump 2 corresponding to the external signals. The inverter 8 controls the
rotational speed of the vacuum pump based on the output of the control
part 6.