This invention disclosure describes methods for the fabrication of metal
oxide films on surfaces by topotactic anion exchange, and laminate
structures enabled by the method. A precursor metal-nonmetal film is
deposited on the surface, and is subsequently oxidized via topotactic
anion exchange to yield a topotactic metal-oxide product film. The
structures include a metal-oxide layer(s) and/or a metal-nonmetal
layer(s).