The present invention provides a chemical-mechanical polishing (CMP)
composition comprising an amino compound, a radical-forming oxidizing
agent, a radical trapping agent capable of inhibiting radical-induced
oxidation of the amino compound, and an aqueous carrier therefore. The
radical trapping agent is a hydroxyl-substituted polyunsaturated cyclic
compound, a nitrogenous compound, or a combination thereof. Optionally,
the composition comprises a metal oxide abrasive (e.g., silica, alumina,
titania, ceria, zirconia, or a combination of two or more of the
foregoing abrasives). The invention further provides a method of
chemically-mechanically polishing a substrate with the CMP compositions,
as well as a method of enhancing the shelf-life of CMP compositions
containing an amine and a radical-forming oxidizing agent, in which a
radical trapping agent is added to the CMP composition.