A semiconductor memory such as a dynamic RAM having memory mats each
divided into a plurality of units or sub-memory mats. Each sub-memory mat
comprises: a memory array having sub-word lines and sub-bit lines
intersecting orthogonally and dynamic memory cells located in lattice
fashion at the intersection points between the intersecting sub-word and
sub-bit lines; a sub-word line driver including unit sub-word line
driving circuits corresponding to the sub-word lines; a sense amplifier
including unit amplifier circuits and column selection switches
corresponding to the sub-bit lines; and sub-common I/O lines to which
designated sub-bit lines are connected selectively via the column
selection switches. The sub-memory mats are arranged in lattice fashion.
Above the sub-memory mats is a layer of: main word lines and column
selection signal lines intersecting orthogonally, the main word lines
having a pitch that is an integer multiple of the pitch of the sub-word
lines, the column selection signal lines having a pitch that is an
integer multiple of the pitch of the sub-bit lines; and main common I/O
lines to which designated sub-common I/O lines are connected selectively.