Provided is high purity nickel or nickel alloy target for magnetron
sputtering having superior sputtering film uniformity and in which the
magnetic permeability of the target is 100 or more, and this high purity
nickel or a nickel alloy target for magnetron sputtering capable of
achieving a favorable film uniformity (evenness of film thickness) and
superior in plasma ignition (firing) even during the manufacturing
process employing a 300 mm wafer. The present invention also provides the
manufacturing method of such high purity nickel or nickel alloy target.