An electro-optical device includes a holding capacitor with a first electrode electrically connected to a transistor and a pixel electrode, a second electrode disposed opposite to the first electrode, and a multilayer dielectric film structure disposed between the first electrode and the second electrode. The multilayer dielectric film structure includes a low dielectric film and first and second high dielectric films. The first and second high dielectric films sandwich the low dielectric film from a first electrode side and a second electrode side, respectively. Both of the first and second high dielectric films have a permittivity that is higher than that of the low dielectric film.