Integrated circuit bond pads are provided for forming wire bonds to
integrated circuit package pins. Each pad uses a bond pad structure that
provides room for under-pad circuitry. The under-pad circuitry can be
connected to other circuitry on the integrated circuit, thereby providing
efficient use of circuit real estate. The bond pad structures are formed
in the dielectric stack portion of the integrated circuit using dummy
bond pads and bond pad support structures. Bond pad support structures
may be formed from metal in metal interconnect layers. Vias may be used
to connect the bond pad support structures to each other and to the dummy
bond pads. Bond pad support structures may be formed in a polysilicon
layer at the bottom of the dielectric stack. A contact layer contains
metal plugs that connect the polysilicon bond pad support structures to
the lowermost metal-layer bond pad support structures.