The objective of the present invention is to provide a method for
obtaining a high purity disilicon hexachloride by removing a silanol with
good efficiency from a disilicon hexachloride material containing the
silanol as an impurity. The purification method for disilicon
hexachloride of the present invention comprises a process for contacting
a disilicon hexachloride material containing disilicon hexachloride and a
silanol as an impurity with an adsorbent material such as activated
carbon to remove the silanol. The method may further comprise a
distillation process. The above processes are preferably performed in an
atmosphere of an inert gas.