An exposure apparatus includes a stage configured to hold an original
thereon and to move in a horizontal direction, a first interferometer
configured to emit first measurement light used for measuring a position
of the stage in a vertical direction thereof, a first mirror provided on
a bottom surface of the stage, and a second mirror provided directly
below the first mirror. The second mirror is disposed so as to guide the
first measurement light emitted from the first interferometer to the
first mirror.