A BAW device includes a semiconductor substrate with a surface region, an insulating layer formed on the surface region and a piezoelectric layer sandwiched by a first and second electrode, wherein the second electrode is formed on the insulating layer. The surface region is performed such that a voltage dependence of a capacitance between the substrate and the second electrode is substantially suppressed.

 
Web www.patentalert.com

< Method of crystallizing semiconductor film

< Array substrate for liquid crystal display device and method of fabricating the same

> Liquid crystal display device having bent source electrode and bent drain electrode

> Liquid crystal display device and method for manufacturing the same

~ 00617