A micro-electro-mechanical system (MEMS) current sensor for sensing a
magnetic field produced by an electrical current flowing in a conductor
includes a first fixed element and a moving element. The moving element
is spaced away from the first fixed element and is movable relative to
the fixed element responsive to a magnetic field produced by an
electrical current flowing in a conductor for providing a mechanical
indication of a strength of the magnetic field. The sensor also includes
a tunneling current generator for generating a tunneling current between
the first fixed element and the moving element and a tunneling current
monitor for monitoring a change in the tunneling current responsive to
the mechanical indication to provide an indication of a value of the
electrical current in the conductor.