A method of forming a MEMS (Micro-Electro-Mechanical System), includes forming an ambient port through a MEMS cap which defines a cavity containing a plurality of MEMS actuators therein; and bonding a lid arrangement to the MEMS cap to hermetically seal the ambient port.

 
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> Method for cleaning a solar cell surface opening made with a solar etch paste

> Multimode planar waveguide spectral filter
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