A method for producing a micromechanical component, preferably for fluidic
applications having cavities. The component is constructed from two
functional layers, the two functional layers being patterned differently
using micromechanical methods. A first etch stop layer having a first
pattern is applied to a base plate. A first functional layer is applied
to the first etch stop layer and to the first contact surfaces of the
base plate. A second etch stop layer, having a second pattern, is applied
to first functional layer. A second functional layer is applied to the
second etch stop layer and to the second contact surfaces of the first
functional layer. An etching mask is applied to the second functional
layer. The second and the first functional layer are patterned as
sacrificial layers by the use of the first and the second etch stop layer
by etching methods and/or by using the first and the second etch stop
layer. By supplementing patterning of the base plate, additional movable
fluidic elements may be implemented, using the method. The method is
preferably used for producing a micropump having an epitactic polysilicon
layer as the pump diaphragm.