A compression system for an inductively heated pusher furnace controls
movement of susceptors during thermal contraction thereof. The system
includes a plurality of furnace sections each having a susceptor wherein
each susceptor abuts an adjacent susceptor and wherein the susceptors
include first and last susceptors. A compression plate abuts the first
susceptor to apply force thereon toward the last susceptor to keep the
susceptors in abutment with each other during contraction of the
susceptors during cooling thereof. An actuator for moving the compression
plate is preferably automatically controlled by a computerized control
system. The susceptors together form a tunnel through which pusher plates
travel and have overlapping joints which seal against the escape of
gasses and allow for a degree of susceptor contraction without forming a
gap therebetween even in the absence of compression of the susceptors.