A method of providing a memory cell comprises providing a semiconductor
substrate including a body of a first conductivity type, first and second
regions of a second conductivity type and a channel between the first and
second regions; arranging a first insulator layer adjacent to the
channel; arranging a charge storage region adjacent to the first
insulator layer; arranging a second insulator layer adjacent to the
charge storage region; arranging a first conductive region adjacent to
the second insulator layer; arranging a filter adjacent to the first
conductive region; and arranging a second conductive region adjacent to
the filter. The second conductive region overlaps the first conductive
region at an overlap surface. A line perpendicular to the overlap surface
intersects at least a portion of the charge storage region.