In order to improve a measurement accuracy of a mass flow meter, the mass
flow meter comprises a flow rate calculating section that obtains an
output signal from a sensor section having a thermosensitive resistive
element arranged in a flow channel where a sample gas flows and that
calculates a flow rate of the sample gas, a pressure measuring section
that measures a primary side pressure in the flow channel, and a flow
rate correcting section that corrects the measured flow rate obtained by
the flow rate calculating section by the use of the primary side pressure
obtained by the pressure measuring section and a gas coefficient
determined by an isobaric specific heat of the sample gas.