A layer of nanoparticles having a dimension on the order of 10 nm is
employed to form a current constricting layer or as a hardmask for
forming a current constricting layer from an underlying insulator layer.
The nanoparticles are preferably self-aligning and/or self-planarizing on
the underlying surface. The current constricting layer may be formed
within a bottom conductive plate, within a phase change material layer,
within a top conductive plate, or within a tapered liner between a
tapered via sidewall and a via plug contains either a phase change
material or a top conductive material. The current density of the local
structure around the current constricting layer is higher than the
surrounding area, thus allowing local temperature to rise higher than
surrounding material. The total current required to program the phase
change memory device, and consequently the size of a programming
transistor, is reduced due to the current constricting layer.