An epitaxial crystal for a field effect transistor which has a
nitride-based III-V group semiconductor epitaxial crystal grown on a SiC
single crystal base substrate having micropipes by use of an epitaxial
growth method, wherein at least a part of the micropipes spreading from
the SiC single crystal base substrate into the epitaxial crystal
terminate between an active layer of the transistor and the SiC single
crystal base substrate.