Fluidic conduits, which can be used in microarraying systems, dip pen
nanolithography systems, fluidic circuits, and microfluidic systems, are
disclosed that use channel spring probes that include at least one
capillary channel. Formed from spring beams (e.g., stressy metal beams)
that curve away from the substrate when released, channels can either be
integrated into the spring beams or formed on the spring beams. Capillary
forces produced by the narrow channels allow liquid to be gathered, held,
and dispensed by the channel spring probes. Because the channel spring
beams can be produced using conventional semiconductor processes,
significant design flexibility and cost efficiencies can be achieved.