An inspection system and method is provided herein for increasing the
detection range of the inspection system. According to one embodiment,
the inspection system may include a photodetector having a plurality of
stages, which are adapted to convert light scattered from a specimen into
an output signal, and a voltage divider network coupled for extending the
detection range of the photodetector (and thus, the detection range of
the inspection system) by saturating at least one of the stages. This
forces the photodetector to operate in a non-linear manner. However,
measurement inaccuracies are avoided by calibrating the photodetector
output to remove any non-linear effects that may be created by
intentionally saturating the at least one of the stages. In one example,
a table of values may be generated during a calibration phase to convert
the photodetector output into an actual amount of scattered light.