There is provided a system and method for fabricating a fin field effect
transistor. More specifically, in one embodiment, there is provided a
method comprising depositing a layer of nitride on a substrate, applying
a photolithographic mask on the layer of nitride to define a location of
a wall, etching the layer of nitride to create the wall, removing the
photolithographic mask, depositing a spacer layer adjacent to the wall,
etching the spacer layer to create a spacer adjacent to the wall, wherein
the spacer and the wall cover a first portion of the substrate, and
etching a second portion of the substrate not covered by the spacer to
create a trench.