A method of making a Lateral-Moving Micromachined Thermal Bimorph which
provides the capability of achieving in-plane thermally-induced motion on
a microchip, as opposed to the much more common out-of-plane, or
vertical, motion seen in many devices. The present invention employs a
novel fabrication process to allow the fabrication of a lateral bimorph
in a fundamentally planar set of processes. In addition, the invention
incorporates special design features that allow the bimorph to maintain
material interfaces.