In accordance with the present invention, a method of fabricating a concave
capacitor is provided. The concave capacitor of the present invention
includes an adhesion spacer is formed between a concave pattern comprising
an interlayer dielectric film and a lower electrode is provided. In the
concave capacitor fabricating method, an interlayer dielectric film is
formal semiconductor substrate. A concave pattern having a storage node e
exposing part of the upper surface of the semiconductor substrate is form
by patterning the interlayer dielectric film. An adhesion spacer is formed
on t sidewall of the concave pattern exposed by the storage node hole. A
lower electrode to cover the adhesion spacer and the upper surface of the
semiconductor substrate exposed by the storage node hole is formed in the
storage node hole