The present invention provides a composition for forming an antireflective
coating film which is not liable to intermixing between the resist
composition layer and the antireflective coating layer and a method for
forming a resist pattern having an excellent dimensional accuracy and
section shape. The composition consists of (A) a compound which produces
an acid upon irradiation with actinic rays, (B) a compound which undergoes
crosslinking reaction in the presence of an acid, (C) a dye and (D) an
organic solvent. The method for forming a resist pattern comprises
applying the composition for forming an antireflective coating film to a
semiconductor substrate, drying the composition coated, irradiating the
entire surface of the coated material with actinic rays so that it
undergoes crosslinking reaction to form an antireflective coating film
thereon, applying a resist composition to the antireflective coating film,
drying the coated material, and then subjecting the coated material to
lithographic processing to form a resist pattern thereon.